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Fundamental principles of engineering nanometrology /

by Leach, R. K.
Series: Micro and nano technologies Edition statement:First edition. Published by : Wlliam Andrew ; | Elsevier Science, (Oxford : | Amsterdam :) ISBN: 9780080964546 (hbk.).
Subject(s): Nanotechnology. | Microtechnology. | Metrology.
Year: 2010
Online resources:
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Item type Location Collection Call number Status Date due Barcode
Books Books General Collection Applied Sciences 620.50287 L4342 2010 (Not for Overnight) (Browse shelf) Available 008834

Includes bibliographical references and index.

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