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Leach, R. K.

Fundamental principles of engineering nanometrology / - First edition. - Oxford : Amsterdam : Wlliam Andrew ; Elsevier Science, 2010. - Micro and nano technologies .

Includes bibliographical references and index.

ISBN: 9780080964546 (hbk.)

Subjects--Topical Terms:
Nanotechnology.
Microtechnology.
Metrology.

Dewey Class. No.: 620.50287 / L4342 2010

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